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Schematic structure of the integrated humidity sensor. Humidity schematic circuit (a) schematic diagram showing the fabrication of the humidity sensor

(a) Schematic diagram of the humidity verification setup. (b) Realized

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(a) schematic diagram of the humidity verification setup. (b) realizedSchematic diagram of humidity sensor setup. Humidity sensor basics : 3 stepsSimplified schematic of the humidity sensor's read-out circuitry.

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